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FU Berlin
Digitale Dissertation

Daniel Fischer :
Properties of CuGaSe2 thin films depostied by chemical vapor deposition
Eigenschaften von CuGaSe2-Dünnschichten hergestellt mit chemischer Gasphasenabscheidung

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Abstract

The deposition of CuGaSe2 thin films by chemical vapor deposition (CVD) using halogenes and the examination of film properties was the aim of this work. For the first time, the CVD-process was used in an open system for thin film deposition and a systematic characterisation of the layer properties was carried out. Using two binary source materials (Cu2Se and Ga2Se3) and a I2/H2 and HCl/H2 transport-/carriergas mixture, CuGaSe2 thin films can be deposited at reproducible rates and compositions. At substrate temperatures Tsub = 500°C growth rates of 1µm/hr were achieved. This demonstrates the suitability of CVD in an open system using two binary sources. Variing the Cu/Ga-ratio in the gasphase, the Cu/Ga-ration of the films could be set. This enabled the depostion of both Cu- and Ga-rich films.These films did not show any contamination of the bulk by secondary phases, although this had been predicted by thermodynamic equilibrium calculations. This could be explained by kinetic effects. Different crystal shapes for Cu- and Ga-rich films were observed and interpreted on the basis of the periodic bond chain model. It was also shown that Cu-rich CuGaSe2 films exhibit a Cu2-xSe secondary phase on the surface of the crystallites. For increasing Cu-content of the films an increasing density of unoccupied Cu-sites was observed. Finally, the suitability of the CuGaSe2 films as absorbers in Mo/CuGaSe2/CdS/ZnO heterostructures was demonstrated.

Table of Contents

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Titel
Inhalt
1. Einleitung 5
2. Grundlagen und bisherige Ergebnisse 8
3. Morphologische und strukturelle Charakterisierung 45
4. Optische und elektrische Charakterisierung 110
5. Zusammenfassung 138
Anhang

More Information:

Online available: http://www.diss.fu-berlin.de/2001/27/indexe.html
Language of PhDThesis: german
Keywords: CVD, CuGaSe2, thin films, photovoltaics
DNB-Sachgruppe: 29 Physik, Astronomie
Classification PACS: 68
Date of disputation: 07-Nov-2000
PhDThesis from: Fachbereich Physik, Freie Universität Berlin
First Referee: Prof. Dr. Martha Ch. Lux-Steiner
Second Referee: Prof. Dr. W. Richter
Contact (Author): fischer-d@hmi.de
Contact (Advisor): jaeger-waldau@hmi.de
Date created:19-Dec-2000
Date available:22-Feb-2001

 

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