DARWIN Digitale Dissertationen German Version Strich

FU Berlin
Digitale Dissertation

Abel Blazevic :
High-resolution thin layer analysis with energetic heavy ions
Hochauflösende Schichtanalytik mit hochenergetischen schweren Ionen

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Abstract

Within the scope of this work, the magnetic spectrograph Q3D at the ISL (Hahn-Meitner- Institute, Berlin) was used for ERD (Elastic Recoil Detection) analysis. The very high energy resolution of the spectrograph (dE/E = 3 . 10-4 ) leeds to an excellent depth resolution of the measured depth profiles of elements with Z = 1 - 16. With this system we are able to analyse very thin layers (1 - 100 nm), i.e. to estimate the stoichiometry and the depth profiles with a depth resolution of approx. 1 nm (near the surface of an flat sample) of all measured isotopes.
As a result of the high energy resolution, the ERD method is sensitive to smallest variations of the stopping power, for example to the stopping power variation of the projectile in the very first layer near the surface, where the charge equilibrium was not yet been reached.

A novel method was developed to investigate this region, which makes it possible to measure charge changing processes and energy losses in dependence of the incoming (qi) and outgoing (qf) charge state of the projectile. A first experiment with Ne ions at an energy of 2 MeV/u penetrating through thin carbon foils has been carried out successfully. Analysing the measured charge state distributions f(qf) with the Q3D for various incident qi (6+ - 10+), aseperated by a high voltage at the target, we were able to extract the cross sections for all relevant charge changing processes (electron capture, ionisation, excitation and decay). Further we determined the energy loss of the Ne ions in four carbon foils of various thickness depending on qi and qf. Using a Monte-Carlo Simulation and the measured energy losses for the case qi = qf, we succeeded to eliminate the influence of those ions, which have suffered some charge changing fluctuations before they left the foil with qf = qi. In this way we deduced the stopping power of the pure `frozen charge states´ S(q). With these S(q)-values and using the analysis of the charge state distributions as a function of the target thickness, the energy loss of the projectile can be described correctly even in the non-equilibrium region.


Table of Contents

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Inhaltsverzeichnis:

Titel
1 Einleitung (S.1)
1.1 Elastische Rückstoßteilchen-Analyse ERDA (S.2)
1.2 ERDA am Q3D-Magnetspektrographen (S.4)
1.3 Energieverlust von Ionen in Materie (S.6)
2 Schichtanalytik mit schweren Ionen durch
Energieverlustmessung (S.9)
2.1 Verschiedene Meßmethoden der Ionenstrahlanalytik 10
2.2 Energieverlust schwerer Ionen in Materie (S.12)
3 Experimenteller Aufbau (S.21)
3.1 Der Beschleuniger (S.21)
3.2 Die Streukammer (S.23)
3.3 Der Q3D-Magnetspektrograph (S.26)
3.4 Der Fokalebenendetektor (S.28)
3.5 Der Stöchiometriezähler (S.33)
4 ERDA-Messungen am Q3D (S.37)
4.1 Meßbedingungen (S.37)
4.2 Erzeugung der Energiespektren für jedes Isotop (S.40)
4.3 Das Tiefenprofil einer Probe (S.41)
4.4 Diskussion der Tiefenauflösung (S.44)
5 Ladungsverteilungen und Energieverluste im
Nichtgleichgewicht (S.57)
5.1 Eine neue Meßmethode zur Messung von Energieverlusten (S.58)
5.2 Das Experiment: Ne in C (S.61)
5.3 Theoretische Analyse der Ladungsverteilung (S.67)
5.4 Analyse der Energieverluste (S.82)
5.5 Energiestreuung durch Umladungsprozesse (S.97)
5.6 Ausblick (S.99)
6 Zusammenfassung (S.101)
7 Anhang (S.103)
8 Literaturverzeichnis (S.109)


More Information:

Online available: http://darwin.inf.fu-berlin.de/1999/3/indexe.html
Language of PhDThesis: german
Keywords: ERD, energy loss, charge state, stopping power
DNB-Sachgruppe: 29 Physik, Astronomie
Classification PACS: 34.50.Bw; 82.80.Yc
Date of disputation: 09-Dec-1998
PhDThesis from: Fachbereich Physik, Freie Universität Berlin
First Referee: Prof. Dr. Wolfram von Oertzen
Second Referee: Prof. Dr. William Brewer
Third Referee: Prof. Dr. Tilman Butz
Contact (Author): blazevic@hmi.de
Contact (Advisor): bohlen@hmi.de
Date created:26-Jan-1999
Date available:27-Jan-1999

 


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